Check and modify it rf mems switch phd thesis at any stage, from an outline to the final version. Comparative study of perforated rf mems switch sciencedirect. Rf mems switch is a kind of electromechanical structure that is used to short or open a rf to millimeterwavefrequency transmission line. May 24, 2011 the work was inspired and supported by the european space agency esa contract no. Initially, the background of mems, rf mems and fabrication technologies are introduced. Microelectromechanical systems mems concept covers different miniature devices in different disciplines, including but not limited to biological, chemical, electrical, fluidic, magnetic, optical, and thermal applications. Development of a springless rf mems switch development of a springless rf mems switch this thesis reports on the development of a novel 77ghz low loss mems switch with a mechanically unrestrained armature, over a rf transmitting coplanar waveguide. European projects involving esa for space, or on packaging of rf mems with ommic large integrators such as thales, raytheon are often part of such programs the number of rf mems initiatives is still high, and leads to more and more commercial companies airmems, rfutech, proton microtechnik. Phd thesis network switch microelectromechanical systems. In this study, the key material indices considered for mems capacitive switch are. Rf mems switch performance and features such as actuation voltage. A survey of mems switch topologies and results will quickly get you up to speed as to who is doing what.
Phd thesis directed by pierre blondy and aurelian crunteanu. Van caekenberge rf mems on the radar, ieee microwave magazine october 2009. Giovanni soncini universita degli studi di trento february 2005. Overview of rf mems technology and applications sciencedirect. Aguilar armenta, christian james 20 monolithic integration of rfmems switches with reconfigurable phased array antennas. T1 characterization and reliability studies towards piezoelectrically actuated rfmems switches. Rf mems switch phd thesis therefore, we recommend you professional essay tutoring. Scaling effect on rf mems switch eecs at uc berkeley. In this paper a shunt type rf mems switch design and analysis for. Gianfranco dalla betta universit a degli studi di trento coadvisor. Crack in single crystal silicon support beams caused by vibrations from a launch test rf mems limitations rf mems basic 27.
Also, this thesis introduces a new shape for the actuationvoltage waveform to reduce the. For those who wish to read more about rf mems technology and applications, the book by gabriel rebeiz, rf mems theory, design and technology rebeiz, 2003 is recommended for anyone who approaches these components for the first time. Electrostatic low actuation voltage rf mems switches for. Quality and reliability of rfmems switches for space. A comprehensive study on rf mems switch springerlink. Antistiction and selfrecovery active mechanisms for high. An experimental investigation of hot switching contact damage. Rf mems switch with inplane, bistable, electromagnetic actuators for high power applications. This paper represents comparative study of perforated rf mems switch. We have also developed a novel contactless rf mems switch to. Design and analysis of shunt configurationbased rf mems switch. Read more your physics homework can be a real challenge, and the due date can be really close feel free to use our assistance and get the desired result. Request pdf on jul 1, 2019, mahesh angira and others published a novel capacitive rfmems switch for multifrequency operation find.
A novel capacitive rfmems switch for multifrequency operation. Switching contact damage in rf mems switches a thesis presented by anirban basu. The objective of this paper is to investigate novel configurations of planar multiport radiofrequency rf microelectromechanical systems mems ctype and rtype switches and redundancy switch. An rf mems shunt capacitive switch at both up and down states behaves as a. Two mems chips that have a spst single pole single throw contact configuration are installed on the ceramic package using the flip chip bonding method as shown fig. The fabrication of rf mems shunt capacitive switches and mems. Rfmems switch design optimization for longterm reliability. We are offering quick essay tutoring services round the clock. An overview of rf mems switches free download as powerpoint presentation. Design, fabrication and characterization of rf mems inductors. I would like to express my gratitude to everyone who supported me throughout my phd.
This thesis presents a manuscript mems switch concept based. Rf mems have in general seen a remarkable growth in the past two decades due to the immense potentials in defense and commercial applications. Spasos, rf mems switch for reconfigurable antennas, phd thesis, school of engineering and design, brunel university, july 2011. An experimental investigation of hot switching contact. The modifications mainly affect the switch membrane, which is made more robust, and the stopping pillar. High reliability redundancy switch the main purpose of the project is the design and realization of highreliability rf mems switches for satellite payload redundancy networks.
Development of a low actuation voltage electrostatic rf mems. All papers from this agency should be properly referenced. This thesis presents a novel mems switch concept based on an s shaped film. You will not find a more comprehensive treatment of rf mems in one place anywhere else. Introduction to rf mems switch working and its applications. The major part of this chapter is committed to the comparison of the rf mems switches with state of the art solid state. In addition, we have combined thermal actuation and electrostatic actuation mechanisms to achieve lower actuation voltage. An rf mems shunt capacitive switch at both up and down states behaves as a capacitor. Jun 15, 2015 for space applications, vibration considerations are important, because devices are subjected to large vibrations in the launch process fig.
Two types of mems switch architectures are currently used for. Thus, the work presented in this thesis belongs to the rfmems switch. Electromechanical analysis of the rf mems based phase shifter a thesis. Phd dissertation international doctorate school in information and communication technologies dit university of trento electrostatic low actuation voltage rf mems switches for telecommunications kamal jit rangra advisor. Characterisation and modelling of degradation mechanisms in. Electrostatic low actuation voltage rf mems switches for telecommunications, phd thesis, university of trento, italy 2005. May 23, 2014 the rf mems switches are frequently used in microwave and radio frequency communication devices, such as transmitters and receivers, mode selection switch, antenna switch, etc. Rf mems switch phd thesis online writing service includes the research material as well, but these services are for assistance purposes only. To achieve zero power consumption, we have fabricated latching rf mems switches. Science foundation ireland sfi grant 10rfpece2883 characterisation and modelling of degradation mechanisms in rf mems capacitive switches during holddown operation. Phd dissertation international doctorate school in information and communication technologies disi university of trento antistiction and selfrecovery active mechanisms for high reliability rfmems switches alena repchankova advisor. Index termsreconfigurable circuit, rf mems, switch. Conventional rf mems switches for a millimeter wave frequency range have a capacitiveshunt type configuration with high voltage operated, outofplane electrostatic actuators 1. Sample preparation with tetrachloroethylene followed by alcohol and.
Novel design solutions for high reliability rf mems switches. Rf mems switch technology for radio front end applications, julio costa, rfmd. Rf mems mems devices capable of reconfiguring the rf characteristics of a device. Dec 16, 2018 the purpose of this project is to study the scaling effect on radio frequency rf micro electromechanical systems mems switch. Oct 31, 20 this contribution presents an optimization strategy for the mechanical and geometrical characteristics of clampedclamped dielectricless rfmems switches in order to enhance their reliability performances both in terms of switch properties control and longterm actuation behavior.
Rf mems switch performance and features such as actuation voltage, insertion loss, isolation and ease with cost of fabrication and applications are compared and. Abstract of the thesis rf mems dc contact switch for reconfigurable antennas by lei zhou master of science san diego state university, 2006 rf mems switches have experienced increased use for telecommunication application in the last ten years due to their high performance compared to other microelectronic switches. Dccontact mems series switches 7 eel6935 advanced mems 2005 h. Development of a low actuation voltage electrostatic rf mems switch by yasser mafi nejad b. These switches are the unambiguous micro mechanical switches that are intended to operate at rf to mm wave frequencies, which mean 0. When electrostatic force is applied on the fixedfixed beam, beam shifts to downward direction corresponding to zaxis and various displacements at various voltages is obtained. The methodology for the design of coupled resonator. Characterisation and modelling of degradation mechanisms.
Index termsrf mems switch, selfactuation, latching, particle swarm optimization. Minhang bao, analysis and design principles of mems devices, department of electronic engineering, fudan university, china, elsevier 2005. Compared to traditional rf switches, rf mems switches possess many significant advantages, such as negligible dc power consumption, small series capacitance, resistance and insertion loss, good isolation, as well as high linearity and cutoff frequency. Thesis northeastern university microswitch contacts. Lei chen, contact evolution in micromechanical switches. N2 this phd research aims to develop high density piezoelectric rfmems switch arrays to be integrated in an energyefficient agile rf transceiver with reconfigurable antenna.
Submitted in fulfilment of the requirements for the degree of doctor of philosophy deakin university april 2015. A single mems rf switch design has only recently become commercially available and a projected timeframe for full rf mems switch commercialization is on the order of 23 years, assuming the necessary funds are invested in the near future. Finding the best college admission essay help shouldnt rf mems switch phd thesis be a big deal once you can fully understand the tips highlighted in this article. Design and analysis of novel lowvoltage low loss rfmems. This thesis presents novel rf mems switches which can overcome these issues. Development of high performance 618 ghz tunable switchable rf mems filters and their system implications. Discuss your papers details via our messaging system. Development of a springless rf mems switch eprints soton. Capacitive shunt switches capacitive series switches dccontact shunt switches. In this thesis, a fully bicmos embedded rfmems switch for mmwave. Design, simulation and analysis of rfmems switches for.
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